Series 1 wafer handlers robots

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Our wafer handler robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...

Characteristics

• Excellent strucutural rigidity
• Maximum reliability and precision
• Top mounted (TA) or bottom mounted (BA) versions available
• Customized designs
• Absolute or incremental encoder
• Seamless integration with prealigner, linear track and other periphal
• Including "Standard" or "Advanced" Hard- & Software
• ISO 1 clean-room environment compatible
• Made in Germany