IWH Series 3 with 2-link dual arm and body series 3

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Our wafer handler robots have the potential to increase the throughput of an application. The two independent arms mean that the wafers on a station can be replaced very quickly and thus empty runs are prevented.

Characteristics

• Excellent structural rigidity
• Wafer handling of up to 300mm
• Maximum reliability and precision
• Easy connection of a linear track to the robot controller
• Very smooth running
• ® Backlash free Harmonic Drive gears
• Absolute, incremental encoder or resolver
• Integrated 2-channel vacuum display
• Including „Standard“ or „Advanced“ Controller & Software
• ISO 1 clean-room environment compatible
• MTBF: > 50,000 operating hours
• Made in Germany