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Series SHD with SHD super heavy duty dual arm and SHD body
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Series SHD robots are used wherever a higher structural rigidity is required. Maximum reliability and precision due to the integrated 2-channel vacuum display.
Characteristics
- Excellent structural rigidity
- Wafer handling of up to 450mm
- Maximum reliability and precision
- Easy connection of a linear track to the robot controller
- Very smooth running
- Backlash free Harmonic Drive® gears
- Absolute encoder
- Integrated 2-channel vacuum display
- Including „Advanced“ Controller & Software
- MTBF: > 50,000 operating hours
- Made in Germany
ROBOTIK Allgemein/Generally
| Repeatability | T | ±0.02° | |
| R | ±0.02 mm | ||
| Z | ±0.02 mm | ||
| Working range | Z | 13", 15" | |
| radial | 14", 16" | ||
| theta | 500° | ||
| Payload | up to 5 kg (per arm)* | ||
| Maximum speed | T | 180°/s | |
| R | 800 mm/s | ||
| Z | 300 mm/s | ||
| Power supply | 115 – 230 VAC 50 – 60 Hz800 VA | ||
| Main interface | RS-232 [DB9],Ethernet [RJ-45] | ||
| Weight | approx. 60 kg |
*depending on arm confguration
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