末端执行器
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End effectors - IEE SeriesLearn MoreIn stock
End effectors are engineered for handling wafers, for transferring them from a cassette to the prealigner for example.
iselRobotik standard end effectors are available for wafer sizes from 2" (50 mm) to 12" (300 mm) as a horse shoe or paddle version.
The end effectors have a low dead weight, high rigidity and can be supplied with a large number of different optional contact materials, such as PTFE, PEEK, VITON, KALREZ etc. In addition to our standard products we also offer many special designs for your special wafers and substrates and are happy to engineer new solutions.