Triple-axis Logosol Prealigners LPA Series
Description
The Logosol prealigners are innovative, high precision, class 1 compatible Logosol prealigner solutions with integrated scan electronics.
The Logosol prealigners are proprietary products of Logosol, Inc. USA www.logosolinc.com
Characteristics
- innovative all-in-one design
- alignment times < 3.5 seconds
- repeatability: linear 0.025 mm, circular 0.02°
- contactless measurement using LED and CCD sensor
- integrated scanning electronics
- standalone capability
- chuck or pin load and change to another wafer size without rebuild
- transparent, semi-transparent, holed and opaque wafers can be aligned
- SEMI, flat and notch wafer specifications
- for wafer sizes from 2" to 18"
- connection fields available from the side and from below
- option: external (notch sensor)
- option: dual layer for bonded wafer
The information on this page is the sole property of Logosol, Inc. www.logosolinc.com
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Characteristics |
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Specifications |
Logosol Prealigner model |
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Standalone |
Embedded |
Edge handling |
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26-3 |
38-3 |
58-3 |
312-3 |
812-3 |
1218-3 |
25-1E |
38-1E |
58-1E |
312-1E |
812-1E |
1218-1E |
Type |
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Wafer |
2" |
✔ |
– |
– |
– |
– |
– |
✔ |
– |
– |
– |
– |
– |
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3" |
✔ |
✔ |
– |
✔ |
– |
– |
✔ |
✔ |
– |
✔ |
– |
– |
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100 mm |
✔ |
✔ |
– |
✔ |
– |
– |
✔ |
✔ |
– |
✔ |
– |
– |
4EH, 45EH |
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|
125 mm |
✔ |
✔ |
✔ |
✔ |
– |
– |
✔ |
✔ |
✔ |
✔ |
– |
– |
5EH, 45EH, 56EH |
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|
150 mm |
✔ |
✔ |
✔ |
✔ |
– |
– |
– |
✔ |
✔ |
✔ |
– |
– |
6EH, 56EH |
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|
200 mm |
– |
✔ |
✔ |
✔ |
✔ |
– |
– |
✔ |
✔ |
✔ |
✔ |
– |
8EH, 8ET |
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300 mm |
– |
– |
– |
✔ |
✔ |
✔ |
– |
– |
– |
✔ |
✔ |
✔ |
12ET |
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450 mm |
– |
– |
– |
– |
– |
✔ |
– |
– |
– |
– |
– |
✔ |
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Square substrates |
✔ |
✔ |
✔ |
✔ |
✔ |
✔ |
✔ |
✔ |
✔ |
✔ |
✔ |
✔ |
n/a |
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Angular accuracy |
10 000 CPR encoder |
0.04° |
n/a |
0.06° |
n/a |
0.04° |
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24 000 CPR encoder |
0.02° |
0.04° |
0.02° |
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Centering accuracy |
25 µm |
50 µm |
25 µm |
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Max initial offset |
10 mm |
12 mm |
9 mm |
10 mm |
1.7 to 2.0 mm |
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Body |
W |
173 mm |
95 mm |
173 mm |
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L |
267 mm |
317 mm |
404 mm |
266 mm |
328 mm |
267 or 317 mm |
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H |
190 mm |
191 mm |
190 to 196 mm |
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Weight |
5.0 to 5.7 kg |
3.4 to 3.8 kg |
5.3 to 6.0 kg |
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Servo axes |
three |
one |
three |
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Handling |
vacuum chuck and pins |
vacuum chuck |
edge handling |
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Facilities required |
100-240VAC, 50-60 Hz, 48 V A or 24 V DC/2A, vacuum 12" Hg for vacuum retention |
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Host interface |
RS232, Ethernet |
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Flat / Notch compatibility |
SEMI standards compliant |
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Wafer opacity |
transparent, semi-transparent and opaque |
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Cleanliness |
class 1 |
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MTBF |
more than 70000 hours |
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