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Aligment on the fly
- wafer centering without prealigner
- offset capturing and centering during
- robot at GET or PUT movement
- no alignment station necessary
- time efficient wafer centering
Aligment on the fly
- wafer centering without prealigner
- offset capturing and centering during
- robot at GET or PUT movement
- no alignment station necessary
- time efficient wafer centering
ROBOTIK Allgemein/Generally
(Size: 4.8 MB)
Last update 2024/03/08
