Linear Track - iLD Series

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In order to increase the robot's radius of action, the handling system can simply be expanded by adding a further axis that is fully integrated into the system. Depending on the application, it can be mounted below the wafer handler or with the wafer handler mounted on the side. Due to the use of linear motors, the linear axes are very dynamic, low-maintenance and smooth-running. They achieve high acceleration values and speeds, approach positions very precisely and work practically wear-free due to the omission of mechanical connecting links.
Due to the segment design, lengths of up to 32 meters with absolute encoders can be realized.
 

Characteristics

• speed up to 4,5m/s
• acceleration up to 10 m/s²
• total length up to 32 m
• repeatability +/- 0.01 mm
• option: top or side mounting
• fully integrated into the robot system
• direct drive motor
• low-maintenance
• MTBF: >70,000 operating hours
• Made in Germany