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Series 1 wafer handlers robots

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Our wafer handler robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...

Characteristics

Excellent strucutural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions available
Customized designs
Absolute or incremental encoder
Seamless integration with prealigner, linear track and other periphal
Including "Standard" or "Advanced" Hard- & Software
ISO 1 clean-room environment compatible
Made in Germany

More Information

More Information
Repeatability	T: +/- 0,02 ° R: +/- 0,02 mm Z: +/- 0,02 mm
Working range	Z: 10", 13", 17", 21" radial: 10", 12", 14", 16", 20" theta: 450°
Payload	up to 3 kg
Maximum speed	T: 360°/s R: 1000 mm/s Z: 450 mm/s
Power supply	115 – 230 VAC 50 – 60 Hz 500 VA (standard) 550 VA (advanced)
Main interface	RS-232 [DB9] Ethernet [RJ-45]
Weight	approx. 25 – 32 kg