Wafer Mapping Sensor Cyberoptics

Wafer mapping sensors are used to detect the presence or absence and slotting errors (such as cross-slots) of semiconductor wafers in processing equipment.

They are typically mounted on robot arms or other wafer handling devices. EX-QS wafer mapping sensors are general-purpose wafer mapping sensors that excel at detecting even the most difficult to detect dark or coated wafers. EX-QS sensors can be used for notched or flatted wafers.

• light source: 2 x 850 mm diode lasers
• optimum detecting range: 38 mm (1.5")
• Maximum detecting range: 40 mm (1.6")
• Laser class 1
• PNP